On-Demand Growth of Semiconductor Heterostructures Guided by Physics-Informed Machine Learning
Summary
SemiEpi connects a physics model, in-situ sensing and immediate feedback to control molecular-beam epitaxy.
Evidence & checks
- Discovery channel
- Science Advances
- Original material
- doi.org
- Material type
- Source page; material type not verified
- Material basis
- Retrieval basis unknown
- Review status
- No human-review record